photons × phonons × electrons × strain on a chip

Engineering light and sound at the quantum limit.

The QP³ Lab builds integrated circuits from state-of-the-art nanoscale materials that couple photons, phonons, charge carriers and external fields — enabling new tools for quantum computing, networking, signal processing, and precision sensing.


research

Four threads, brought together into integrated devices

Strain sits at the centre: every coupling we engineer runs through mechanics, or between the carriers around it. Bright text names the mechanism, grey text what it enables.

Interaction map: strain at the centre, coupled to light, charge/RF and spin, with the mechanism and application of each coupling labelled

Photonic integrated circuits that generate, route, and modulate light for quantum information — with piezo-optomechanics providing low-power, cryo-compatible control.

Schematic — Piezo-optomechanical PIC for atom and ion control
Schematic · after Dong et al., Nat. Photonics 16, 59 (2022); Hogle et al., npj Quantum Inf. 9, 74 (2023); Freedman et al., Nat. Commun. 16, 10959 (2025)

Piezo-Optomechanical PICs for Trapped Atom & Trapped Ion Quantum Computing

Chip-scale beam delivery, switching, and modulation for atomic qubits. Piezo-actuated photonics provides fast, low-power optical control that scales to the thousands of channels trapped-atom and trapped-ion processors will demand.

Schematic of integrated acousto-optics generating microwave-frequency Raman gate tones
Schematic · after Freedman et al., Nat. Commun. 16, 10959 (2025)

Integrated Acousto-Optics for Microwave-Frequency Raman Gate Generation

A two-photon Raman gate needs a pair of optical tones split by the qubit's microwave transition — typically several gigahertz. Producing that splitting normally means bulk modulators sitting outside the vacuum chamber. Gigahertz acousto-optic modulation of visible light in a CMOS-fabricated photonic circuit generates both tones on chip instead, at the same place the light is delivered to the ion.

Schematic of alumina piezo-optomechanical photonics operating at ultraviolet wavelengths
Schematic · after Castillo et al., Optica Quantum 4, 114 (2026)

Ultraviolet Photonics

Many of the most useful atomic transitions sit in the ultraviolet, exactly where silicon nitride stops being transparent. Low-loss alumina waveguides keep working there, and piezo-optomechanical actuation tunes and modulates them without dissipating heat. CMOS-fabricated alumina circuits bring UV light under the same chip-scale control we already have in the visible — reaching ion species that conventional integrated photonics cannot.

Schematic — Diamond-integrated piezo-optomechanical PIC
Schematic · after Palm et al., Optica 10, 634 (2023); Clark et al., Nano Lett. 24 (2024)

Diamond-Integrated Piezo-Optomechanical PICs for Quantum Computing, Networking & Sensing

Heterogeneous integration of diamond color centers with piezo-optomechanical circuits, linking long-lived spin qubits to photons and phonons for on-chip quantum memories, repeaters, and transducers.

Schematic — Integrated nonlinear photonics
Schematic · after Mishra et al., arXiv:2603.02584 (2026)

Ultra-Low-Loss Piezo-Optomechanics and Integrated Nonlinear Reconfigurable Photonics

Low-confinement silicon nitride waveguides drive propagation loss into the ultra-low regime, and piezo-optomechanical actuators tune them without dissipating heat. The same platform carries nonlinear processes — frequency combs, wavelength conversion, squeezed light — alongside reconfigurable circuits programmable channel by channel, which is what quantum systems demand at scale.

Schematic of a MEMS photonic memristor storing multiple phase levels
Schematic · after Zimmermann et al., arXiv:2607.21693 (2026); Wen et al., Optica 11, 1511 (2024)

Programmable & Non-Volatile Photonic Memory

MEMS cantilevers built in a CMOS foundry hold an optical phase after the drive is removed, turning a photonic circuit into memory. Electrostatic and piezoelectric actuation together give multi-level, strain-latched storage with billion-cycle endurance — the basis for in-memory optical computing and large reconfigurable meshes.

Sound at gigahertz frequencies, guided and amplified on a chip. Phonons are slow, compact, and couple to nearly everything — we make them active circuit elements rather than passive delay lines.

Schematic — Acoustoelectric nonreciprocal phononic device
Schematic · after Hackett et al., Nat. Electron. 6, 76 (2023); Nat. Mater. 23, 1386 (2024)

Active & Nonreciprocal Phononic Devices via Acoustoelectric Interactions

Drifting electrons in a semiconductor can amplify a co-propagating acoustic wave and attenuate the reverse one. We use this acoustoelectric effect to build phononic amplifiers, isolators, and circulators with gain — components RF acoustics has never had. We also work out the noise floor these amplifiers can reach, down to the quantum limit set by the acoustoelectric vacuum itself.

Schematic of an electrically injected surface-acoustic-wave phonon laser
Schematic · after Wendt et al., Nature 649, 597 (2026)

Phonon Lasers

Acoustic gain inside an acoustic cavity gives a laser made of sound. Driving DC current through a semiconductor film on a lithium niobate SAW resonator pushes electrons faster than the speed of sound, amplifying the cavity mode until it crosses threshold into self-sustained coherent oscillation — gigahertz frequencies, dramatic linewidth narrowing, in under 0.15 mm². First demonstrated in Wendt et al., Nature 649, 597 (2026).

Schematic — Quantum phononics device
Schematic · after Taylor et al., npj Quantum Inf. 8, 19 (2022); Raniwala et al., Phys. Rev. Applied 19, 064051 (2023)

Quantum Phononics

Operating phononic circuits in the quantum regime: single-phonon sources, phononic waveguides and resonators coupled to qubits, and mechanical modes as compact quantum memories and interconnects.

Schematic of a superconducting qubit coupled to a phononic resonator through a piezoelectric transducer
Schematic · after Deng et al., arXiv:2607.14319 (2026)

Hybrid Superconducting-Phonon Quantum Devices with Piezoelectric Transduction

A piezoelectric transducer lets a superconducting qubit exchange excitations with a phononic resonator, trading a centimetre-scale microwave mode for an acoustic one thousands of times smaller. Building the AlScN transducer and the 4H-SiC phononic circuit on a single unreleased substrate keeps acoustic loss low while staying compatible with wafer-scale fabrication — a route to compact quantum memories and interconnects operating at millikelvin temperatures.

When photons and phonons share a waveguide — and acoustoelectric gain removes the acoustic loss — entirely new classes of chip-scale RF-photonic processors become possible.

Schematic of an acoustoelectric-enhanced acousto-optic amplifier
Schematic · after Otterstrom et al., Phys. Rev. Applied 19, 014059 (2023); Mack et al., CLEO (2025); Dallyn et al., CLEO (2026)

AE-Enhanced Acousto-Optic Amplifier

Acousto-optic modulation is powerful but lossy; acoustoelectric gain flips the sign. By amplifying the acoustic wave as it scatters light, we realize traveling-wave amplification and low-power modulation in a single hybrid device.

Schematic of an acoustoelectric optoacoustic oscillator
Schematic · acoustoelectric optoacoustic oscillator

AE-OAO: Acoustoelectric Optoacoustic Oscillator

A hybrid optical and acoustic mode-locked laser. An optical cavity and an acoustic cavity share the same waveguide, and acoustoelectric gain sustains an acoustic mode tuned to the optical free spectral range, so the sound wave phase-locks the optical modes to one another. The result is a self-starting pulse train and a coherent frequency comb generated entirely on chip, with no external modulator.

Optomechanical transduction turns tiny forces, fields, and photons into measurable optical signals — with sensitivity that approaches, and is calibrated by, fundamental quantum limits.

Schematic — Optomechanical inertial sensor
Schematic · after Ge et al., APL Photonics 11 (2026)

Optomechanical Inertial Sensors

Accelerometers and gyroscopes that read out a mechanical test mass with light, delivering self-calibrated, navigation-grade inertial sensing in a chip-scale package.

Schematic of an infrared focal-plane array read out by piezo-optomechanical oscillators
Schematic · after Mack et al., CLEO (2026), paper SM1A.4

Infrared Imaging with Piezo-Optomechanical Oscillators

An absorbed infrared photon warms a mechanical resonator and shifts its frequency, so each oscillator becomes an uncooled infrared pixel read out optically rather than electrically. Slotted photonic crystal cavities fabricated in a high-volume CMOS foundry supply the sensitivity, and piezoelectric actuation sets each pixel's operating point — 3.87 THz of resonance tuning at 40 V, raising the optomechanical coupling rate from 160 to 500 GHz/nm.

Schematic — Optomechanical magnetometer
Schematic · after Castillo et al., CLEO (2026)

Optomechanical Magnetometers

Magnetostrictive materials convert magnetic fields into strain that optomechanical cavities read out with extreme precision — compact, room-temperature magnetometry without shielding.

Schematic of a gigahertz optomechanical ultrasound transducer
Schematic · after Hackett et al., arXiv:2607.02936 (2026); Eichenfield, SPIE Quantum Biophotonics (2026)

Optomechanical Ultrasound

Conventional ultrasound resolution is capped by the acoustic wavelength. Pushing transduction to gigahertz frequencies shrinks that wavelength below a micron, and optomechanical readout is sensitive enough to detect the returning echoes — opening a route to imaging structure inside a single cell.

Schematic — Optomechanical X-ray sensor
Schematic · after Felsted et al., SPIE Optical Sensing & Precision Metrology (2026)

Optomechanical X-Ray Sensors

Absorbed X-rays deposit heat and momentum in a mechanical resonator; optical readout resolves the resulting motion, opening a path to high-resolution, chip-scale X-ray detection.

Schematic — Diamond-based quantum sensor
Schematic · after Xue et al., Nat. Commun. 16, 6275 (2025)

Diamond-Based Sensors

Color-center spins in diamond, coupled to strain and integrated photonics, sense magnetic fields, temperature, and rotation at the nanoscale — quantum sensors built into the fabric of our devices.

team

The people behind the devices

Physicists and engineers spanning nanofabrication, quantum optics, RF acoustics, and precision measurement.


Matt Eichenfield

Matt Eichenfield (Principal Investigator)

  • Gustafson Endowed Chair in Quantum Engineering, CU Boulder
  • Distinguished Faculty Joint Appointee, Sandia National Laboratories
  • Co-Founder and CTO, LightlogiQ
Stacy Marquardt

Stacy Marquardt

Executive Assistant
Yuanchen Deng

Yuanchen Deng

Research Scientist
Daniel Lesko

Daniel Lesko

Research Scientist
Mohammad Yusofsani

Mohammad Yusofsani

Postdoc
Alex Wendt

Alex Wendt

Postdoc
Zac Castillo

Zac Castillo

Graduate student
Mayank Mishra

Mayank Mishra

Graduate student
Will Horrocks

Will Horrocks

Graduate student
Will Roberts

Will Roberts

Graduate student
John Mack

John Mack

Graduate student
Dalton Anderson

Dalton Anderson

Graduate student
Chang Ge

Chang Ge

Graduate student
Aileen Zhai

Aileen Zhai

Graduate student
Jake Freedman

Jake Freedman

Graduate student
Miles Ackerman

Miles Ackerman

Graduate student
Kiyan Hocek

Kiyan Hocek

Graduate student
Austin Burrington

Austin Burrington

Graduate student
Alex Miera

Alex Miera

Graduate student
Dallin Felsted

Dallin Felsted

Graduate student
Sinica Guo

Sinica Guo

Graduate student
Rahul Khandelwal

Rahul Khandelwal

Graduate student
Henry Mansfield

Henry Mansfield

Graduate student
Aegean De La Cruz

Aegean De La Cruz

Graduate student
Christian Skinker

Christian Skinker

Graduate student
Ashlee Snider

Ashlee Snider

Undergraduate Intern
news

Latest from the lab

Papers, appointments, and recognition.


2026

Congratulations to Chang Ge on a first first-author paper, out now in APL Photonics

The paper demonstrates a fiber-packaged accelerometer that pairs a differential strain-sensing Mach–Zehnder interferometer with an ultra-rigid bulk-micromachined proof mass (93.4 kHz fundamental, 22.5 pm/g). Despite that rigidity it resolves 4.2 µg/√Hz, holds a bias instability of 6.3 µg at 243 seconds, and has a clear path to 330 ng/√Hz through improved fiber-to-chip coupling — all without needing an exotic laser source.

Read more →
2026 · 08

John Mack and Will Roberts pass their comprehensive exams

Congratulations to QP³ PhD students John Mack and Will Roberts for successfully passing their comprehensive exams on Thursday, August 13.

2026 · 07

Photonic memristors from CMOS-foundry MEMS cantilevers

New preprint: an analog-programmable photonic memristor built from micro-electromechanical cantilevers on low-loss silicon nitride, requiring no back-end materials integration. Electrostatic and piezoelectric actuation give up to 5-bit phase storage, 50 kbit/s programming, strain-assisted retention beyond an hour, and endurance past a billion cycles.

Read more →
2026 · 07

Coupling superconducting circuits to microwave phonons in AlScN on 4H-SiC

A monolithic route to joining superconducting quantum circuits with low-loss gigahertz phonons on a single unreleased substrate — the material platform underpinning our quantum phononics program.

Read more →
2026 · 07

Nonequilibrium thermodynamics of the acoustoelectric quantum vacuum

What happens to the phonon vacuum when a drift current pushes an acoustoelectric system out of equilibrium? This work sets the thermodynamic and quantum-noise framework that determines how quiet an acoustoelectric amplifier can ultimately be.

Read more →
2026 · 07

Optomechanical transducers for sub-micron ultrasound imaging

Design study for gigahertz optomechanical ultrasound transduction, where the acoustic wavelength falls below a micron and optical readout recovers the echo — a path toward imaging inside individual cells.

Read more →
2026 · 07

Piezo-optomechanical photonics, monolithically integrated with CMOS electronics

New preprint: 200 mm photonic wafers built directly on completed CMOS driver wafers, with more than two million electrical connections per die at a 6.4 µm electrode pitch. We introduce segmented photonic digital-to-analog converters and program phase shifters, interferometers, routing trees, and ring resonators over a standard HDMI interface — a path to wafer-scale electronic control of quantum and classical POMPICs.

Read more →
2026 · 03

Photonic “ski jumps” break the inertial limit — published in Nature

Our chip-to-world beam scanning work appeared in Nature 651, 356 (2026). A nanoscale waveguide on a piezoelectric cantilever curls ~90° out of plane in under 0.1 mm², emitting a diffraction-limited beam and scanning it in 2D — sidestepping the trade-off between actuator mass and aperture size that has long constrained micromechanical scanners. Joint work with MIT, MITRE, and Sandia through the Quantum Moonshot Program.

Read more →
2026 · 01

First electrically injected, solid-state SAW phonon laser — published in Nature

A lithium niobate SAW resonator with an internal, DC-injected semiconductor gain medium in under 0.15 mm² crosses threshold into self-sustained coherent oscillation at 1 GHz, with linewidth narrowing below 100 Hz. Nature 649, 597 (2026). Led by graduate student Alexander Wendt; covered by CU Boulder Today and ScienceDaily.

Read more →
2025 · 12

Gigahertz acousto-optic modulation of visible light in a CMOS foundry circuit

Published in Nature Communications: GHz-frequency acousto-optic phase modulation of visible light in a photonic circuit built in a 200 mm CMOS foundry — a key step toward wafer-scale optical control of atomic and ionic qubits.

Read more →
2025 · 09

Matt Eichenfield named inaugural Karl Gustafson Endowed Chair of Quantum Engineering

The lab joins CU Boulder’s Department of Electrical, Computer and Energy Engineering, where the endowed chair supports work spanning ultra-scalable photonics, nano-optomechanics, and phononics — alongside CU’s CUbit Quantum Initiative and the new National Quantum Nanofab facility.

Read more →
2025

DARPA Director’s Fellowship awarded

Following the 2023 DARPA Young Faculty Award, the Director’s Fellowship extends support for our work on acoustoelectric and piezo-optomechanical device platforms.

2024 · 05

Giant electron-mediated phononic nonlinearity in Nature Materials

Synthetic semiconductor–piezoelectric heterostructures make phonons interact with each other far more strongly than in any conventional material, opening a route to compact, high-efficiency RF signal processing. Nature Materials 23, 1386 (2024).

Read more →
publications

Selected publications

Newest first. Use the filters to view journal articles, preprints, or conference presentations on their own.


2026

Toward navigation-grade optomechanical accelerometers on a chip

C. Ge, D. Dominguez, A. Rubenok, M. Miller, M. Eichenfield

APL Photonics
2026

Quantum-limited acoustoelectric amplification in a piezoelectric–2DEG heterostructure

E. Chatterjee, D. Soh, M. Eichenfield

Phys. Rev. Research 8, 023185
2026

Nanophotonic waveguide chip-to-world beam scanning

M. Saha, Y. H. Wen, A. S. Greenspon, M. Zimmermann, K. J. Palm, A. Witte, Y. M. Goh, C. Li, J. Bumstead, K. Schädler, R. Fortin, M. Dong, A. J. Leenheer, G. Clark, G. Gilbert, M. Eichenfield, D. Englund

Nature 651, 356
2026

An electrically injected solid-state surface acoustic wave phonon laser

A. Wendt, M. J. Storey, M. Miller, D. Anderson, E. Chatterjee, W. Horrocks, B. Smith, P.-S. Wong, S. Arterburn, T. A. Friedmann, L. Hackett, M. Eichenfield

Nature 649, 597
2026

CMOS-fabricated ultraviolet light modulator using low-loss alumina piezo-optomechanical photonics

Z. A. Castillo, R. Shugayev, D. Dominguez, M. Gehl, N. Karl, A. Leenheer, B. Little, Y.-Y. Jau, M. Eichenfield

Optica Quantum 4, 114
2026

Hybrid electrostatic–piezo MEMS photonic integrated modulators

T.-L. Le, H. Singh, J. M. Boyle, M. Zimmermann, A. J. Leenheer, D. Dominguez, M. Eichenfield, M. Dong

APL Photonics 11
2026

Micro-electromechanical photonic integrated memristors

M. Zimmermann, J. M. Boyle, H. Singh, A. Witte, K. Palm, T.-L. Le, A. J. Leenheer, D. Dominguez, M. Eichenfield, M. Dong

arXiv:2607.21693
2026

Strategic plan for neutral atom quantum computation

A. J. Menssen, M. Gullans, T. Manovitz, J. M. Taylor, J. Cong, J. Sinclair, Z. Aqua, D. J. Blumenthal, J. Ataides, J. Borregaard, et al.

arXiv:2607.21554
2026

Towards a monolithic platform for coupling superconducting circuits to low-loss microwave phonons in AlScN on 4H-SiC

Y. Deng, W. W. Roberts, S. Skinner-Ramos, D. Anderson, K. Hewey, X. Du, M. Miller, B. Smith, H. Lee, P. Chen, et al.

arXiv:2607.14319
2026

Nonequilibrium thermodynamics of the acoustoelectric quantum vacuum

R. O. Behunin, A. Shepherd, F. Intravaia, M. Eichenfield

arXiv:2607.12228
2026

Design of optomechanical transducers for sub-micron resolution ultrasound imaging

L. Hackett, C. Ge, A. Miera, B. Smith, M. Eichenfield

arXiv:2607.02936
2026

Monolithic integration of piezo-optomechanical photonics and CMOS electronics

M. Zimmermann, A. Zhai, A. J. Leenheer, J. Boyle, M. Mishra, D. Dominguez, M. Koppa, W. Jehle, C. Panuski, M. Dong, et al.

arXiv:2607.01514
2026

Noise factor of Brillouin amplifiers

J. H. Dallyn, N. T. Otterstrom, M. Eichenfield, P. T. Rakich, R. O. Behunin

arXiv:2604.12906
2026

Noise and dynamics in acoustoelectric waveguides

R. O. Behunin, A. Shepherd, R. Yuan, T. Ray, M. J. Storey, P. T. Rakich, N. T. Otterstrom, M. Eichenfield

arXiv:2603.15482
2026

Ultra-low loss piezo-optomechanical low-confinement silicon nitride platform for visible wavelength quantum photonic circuits

M. Mishra, G. Choi, W. He, G. M. Talcott, K. Kearney, M. Gehl, A. Leenheer, D. Dominguez, N. T. Otterstrom, M. Eichenfield

arXiv:2603.02584
2026

Exact solutions to acoustoelectric interactions in arbitrary geometries

W. W. Roberts, M. Eichenfield

arXiv:2602.19482
2026

Cryogenic enhancement of phononic four-wave mixing in AlScN/SiC

A. K. Behera, B. Smith, X. Du, Y. Deng, M. Miller, N. Sagartz, M. Koppa, C. T. Harris, M. Lilly, R. H. Olsson III, et al.

arXiv:2601.12418
2026

Cellular and subcellular ultrasound at the quantum limit with nano-optomechanics

M. Eichenfield

SPIE Quantum Biophotonics
2026

Photonic integrated circuits for sub-microkelvin bolometry

D. Felsted, D. Dominguez, C. Nordquist, N. Williams, K. Kearney, M. Eichenfield

SPIE Optical Sensing & Metrology
2026

A MEMS-enabled quantum socket for control of all photonic and spin degrees of freedom of an artificial atom in a microdisk resonator

A. Zhai, G. Clark, M. Dong, H. Wen, A. Greenspon, K. Palm, D. Dominguez, A. J. Leenheer, Y. Duan, G. N. Gilbert, et al.

SPIE Quantum Computing & Simulation
2026

Microwave frequency phononic classical and quantum information processing enabled by strong electron-phonon interactions

M. Eichenfield

SPIE Quantum Computing & Simulation
2026

CMOS-fabricated photonic integrated circuits for atomic and ionic qubit control

J. M. Freedman, A. Leenheer, N. Sadafi, J. Montoya, N. T. Otterstrom, M. Eichenfield

SPIE Integrated Optics
2026

CMOS-fabricated electro-optomechanical microdisk resonator with DC-tunable mechanical dissipation

J. Mack, A. Miera, A. Starbuck, A. Leenheer, D. Trotter, N. T. Otterstrom, M. J. Storey, M. Eichenfield

SPIE Terahertz & RF
2026

Strain-sensing interferometers: a new paradigm for ultra-high-performance and deployable optical sensors

M. Eichenfield

SPIE Photonic & Phononic Nanostructures
2026

A scanning waveguide-based path to a> 30 MP display in a phone camera form-factor

Y. H. Wen, M. Saha, M. Zimmermann, A. Greenspon, A. Witte, J. Bumstead, K. Schaedler, A. Leenheer, G. Clark, G. Gilbert, et al.

SPIE AR / VR / MR
2026

An Ultra-Scalable Quantum Squeezer Through Acoustic Parametric Amplification in a Piezoelectric-2DEG Heterostructure

E. Chatterjee, D. Soh, M. Eichenfield

APS Global Physics Summit
2026

Interstitial nitrogen molecule CMOS-fabricated quantum memory for frequency and bandwidth conversion

K. B. Oolman, D. Dominguez, I. Brener, M. Eichenfield

APS DAMOP
2026

Cryogenic Enhancement of the Phononic Four-Wave Mixing Modal Nonlinearity in AlScN/4H-SiC

A. K. Behera, B. Smith, X. Du, Y. Deng, M. P. Lilly, C. T. Harris, R. H. Olsson III, M. Eichenfield, L. Hackett, et al.

APS Global Physics Summit
2026

Coherent On-Chip Suppression of Resonant Pump Light for High-Fidelity Diamond Spin–Photon Entanglement

A. Zhai, G. Clark, D. A. Golter, A. Leenheer, M. Saha, D. Englund, G. Gilbert, M. Eichenfield

APS Global Physics Summit
2026

Towards Quantum Limited Amplification of Phonons via Acosutoelectric Three-Wave Mixing

W. W. Roberts, K. Hewey, L. Hackett, M. R. Miller, N. T. Otterstrom, M. Eichenfield

APS Global Physics Summit
2026

Acoustoelectrically Enhanced Phonon-Photon Emitter-Receivers

K. Hocek, M. Eichenfield, M. Storey, M. R. Miller

APS Global Physics Summit
2026

Uniformity and Stability of a Stress-Programmable 64-Scanning Waveguide Array

Y. H. Wen, M. Saha, M. Zimmermann, A. S. Greenspon, J. Boyle, A. J. Leenheer, G. Gilbert, M. Eichenfield, D. R. Englund, et al.

CLEO: Applications and Technology
2026

Free Carrier Mediated Enhancement of Brillouin Optomechanical Interactions in a CMOS Fabricated Platform

M. J. Storey, J. H. Dallyn, A. Starbuck, A. Leenheer, K. Musick, D. Trotter, A. Pomerene, P. T. Rakich, N. T. Otterstrom, M. Eichenfield, et al.

CLEO: Science and Innovations
2026

CMOS Fabricated, Piezoelectrically Tunable Silicon Cavity Optomechanics

J. T. Mack, M. J. Storey, A. Miera, A. Starbuck, A. Leenheer, D. Trotter, N. T. Otterstrom, M. Eichenfield

CLEO: Science and Innovations
2026

Frequency and Bandwidth Conversion with Integrated CMOS Fabricated Quantum Memory

K. Oolman, D. Dominguez, I. Brener, M. Eichenfield

CLEO: Fundamental Science
2026

Fundamental noise factor of Brillouin optomechanical amplifiers

J. H. Dallyn, N. T. Otterstrom, M. Eichenfield, P. Rakich, R. Behunin

CLEO: Fundamental Science
2026

CMOS-Fabricated Piezo-Optomechanical Platform for Hyperfine Qubit Control

J. M. Freedman, A. Leenheer, N. Sadafi, J. Montoya, N. T. Otterstrom, M. Eichenfield

CLEO: Applications and Technology
2026

Compact Visible Wavelength Polarization Filters on a CMOS-Compatible Wafer-Scale Platform

A. S. Greenspon, K. Palm, J. Boyle, A. J. Leenheer, G. Gilbert, M. Eichenfield, D. R. Englund

CLEO: Science and Innovations
2026

Monolithic Integration of a Piezo-MEMS PIC on a Commercial CMOS EIC Backplane

M. Zimmermann, J. Boyle, A. J. Leenheer, D. Dominguez, M. Koppa, M. Mishra, M. Dong, G. Gilbert, D. R. Englund, M. Eichenfield, et al.

CLEO: Science and Innovations
2026

Programmable Photonic Integrated Memristor with Electrostatic-Piezo MEMS Actuation

J. Boyle, M. Zimmermann, H. Singh, T. Le, A. J. Leenheer, D. Dominguez, M. Eichenfield, M. Dong

CLEO: Science and Innovations
2026

Enhanced acousto-optic modulation through a heterogeneously integrated acoustoelectric amplifier on a silicon nitride on lithium niobate platform

J. H. Dallyn, M. J. Storey, M. Miller, M. Eichenfield, N. T. Otterstrom

CLEO: Science and Innovations
2026

Piezo-Optomechanical Magnetometery at Super Low Frequencies

Z. A. Castillo, B. P. Smith, N. J. Rodgers, A. Will-Cole, T. Mion, K. Bussmann, P. Finkle, M. Eichenfield

CLEO: Science and Innovations
2026

Strain-Tuned Tin-Vacancy Centers for Indistinguishable Photons in an Integrated Photonics Platform

D. A. Golter, G. Clark, K. J. Palm, M. Zimmermann, W. Yzaguirre, A. J. Leenheer, M. Eichenfield, G. Gilbert, D. R. Englund, et al.

Quantum 2.0
2025

Gigahertz-frequency acousto-optic phase modulation of visible light in a CMOS-fabricated photonic circuit

J. M. Freedman, M. J. Storey, D. Dominguez, A. Leenheer, S. Magri, N. T. Otterstrom, M. Eichenfield

Nat. Commun. 16, 10959
2025

Scalable low-loss cryogenic packaging of quantum memories in CMOS-foundry processed photonic chips

R. Bernson, A. Witte, G. Clark, K. Gradkowski, J. Yang, M. Saha, M. Zimmermann, A. Leenheer, K. C. Chen, G. Gilbert, M. Eichenfield, D. Englund, P. O'Brien

Optica Quantum 3, 569
2025

Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator

T. Vanackere, A. Hermans, I. Christen, C. Panuski, M. Dong, M. Zimmermann, H. Raniwala, A. J. Leenheer, M. Eichenfield, G. Gilbert, et al.

Nat. Commun.
2025

Monolithic AlScN/SiC phononic waveguides for scalable acoustoelectric and quantum devices

Y. Deng, D. Anderson, X. Du, W. Roberts, M. Miller, B. Smith, L. Hackett, R. H. Olsson III, M. Eichenfield

APL Mater. 13
2025

Spin-optomechanical cavity interfaces by deep subwavelength phonon-photon confinement

H. Raniwala, P. Anand, S. Krastanov, M. Eichenfield, M. E. Trusheim, D. R. Englund

npj Quantum Inf. 11, 120
2025

All-optical reconfiguration of single silicon-vacancy centers in diamond for non-volatile memories

Y. Xue, X. Ni, M. Titze, S. S. Su, B. Wu, L. Zhang, C. Cui, S. Guha, M. Eichenfield, L. Fan

Nat. Commun. 16, 6275
2025

Low-dimensional solid-state single-photon emitters

J. Chen, C. Cui, B. Lawrie, Y. Xue, S. Guha, M. Eichenfield, H. Zhao, X. Yan

Nanophotonics 14, 1687
2025

Stress accommodation in nanoscale Dolan bridges designed for superconducting qubits

S. Skinner-Ramos, M. L. Freeman, D. Pete, R. M. Lewis, M. Eichenfield, C. T. Harris

Superconductivity 14, 100158
2025

Designs for scalable construction of hybrid quantum photonic cavities

A. S. Greenspon, M. Dong, I. Christen, G. Gilbert, M. Eichenfield, D. Englund

APL Quantum 2, 026110
2025

A terahertz-bandwidth non-magnetic isolator

H. Cheng, Y. Zhou, F. Ruesink, M. Pavlovich, S. Gertler, A. L. Starbuck, A. J. Leenheer, A. T. Pomerene, D. C. Trotter, C. Dallo, M. Boady, K. M. Musick, M. Gehl, A. Kodigala, M. Eichenfield, A. L. Lentine, N. T. Otterstrom, P. T. Rakich

Nat. Photonics 19, 533
2025

Chiral microwave nonreciprocity demonstrated via Rayleigh and Sezawa modes supported in an Al0.58Sc0.42N/4H-SiC platform

A. R. Will-Cole, X. Du, B. Luo, V. Lauter, A. Grutter, L. Hackett, M. Miller, Y. Deng, B. Smith, O. Pitcl, et al., M. Eichenfield

Phys. Rev. Applied 23, 034058
2025

An integrated photonics platform for high-speed, ultrahigh-extinction, many-channel quantum control

M. Zhao, M. Singh, A. Singh, H. Thoreen, R. J. DeAngelo, D. Dominguez, A. Leenheer, F. Peyskens, A. Lukin, D. Englund, et al.

arXiv:2508.09920
2025

Full-color chip-to-free-space nanophotonic scanning waveguide display at 68 Million spots/(s-mm^ 2)

Y. H. Wen, M. Zimmermann, M. Saha, K. J. Palm, A. J. Greenspon, M. Dong, G. Clark, A. J. Leenheer, G. Gilbert, M. Eichenfield, et al.

SPIE AR / VR / MR
2025

Scalable integration and control of diamond color centers in a piezoelectric photonic platform

G. Clark, M. Saha, A. Witte, M. Zimmermann, K. Palm, A. J. Leenheer, G. Gilbert, M. Eichenfield, D. R. Englund, et al.

Quantum 2.0
2025

Coherent Acoustic Control of Tin-Vacancy Spins in a Nanophotonic Quantum Node

D. A. Golter, G. Clark, K. J. Palm, A. S. Greenspon, W. Yzaguirre, A. J. Leenheer, M. Eichenfield, G. Gilbert, D. R. Englund, et al.

Quantum 2.0
2025

Experimental observation of the acoustoelectric effect in monolithically integrated AlScN/SiC heterostructures

X. Du, C. Chang, Y. He, C. Leblanc, M. Eichenfield, D. Jariwala, R. H. Olsson

Transducers
2025

Hybrid Piezoelectric and Electro-Optic Photonic Integrated Circuits

K. J. Palm, M. Zimmermann, A. J. Leenheer, D. Dominguez, G. Clark, G. Gilbert, D. R. Englund, M. Dong, M. Eichenfield, et al.

CLEO: Applications and Technology
2025

A MEMS-Enabled Quantum Socket for the Control of All Photonic and Electronic Degrees of Freedom of an Artificial Atom in a High-Cooperativity Diamond Microdisk

A. Zhai, G. Clark, M. Dong, Y. H. Wen, A. Greenspon, K. Palm, D. Dominguez, A. Leenheer, Y. Duan, J. Mack, et al.

CLEO: Science and Innovations
2025

Towards Phononic Parametric Amplification via Acoustoelectric Three-Wave Mixing for Quantum Limited Optomechanical Readout

W. Roberts, K. Hewey, M. Miller, N. Otterstrom, L. Hackett, M. Eichenfield

CLEO: Science and Innovations
2025

PT-symmetric acousto-electric self-oscillating SAW resonators for acousto-optic sensing

D. Anderson, A. Wendt, M. J. Storey, B. Smith, M. Miller, Y. Deng, N. T. Otterstrom, L. Hackett, M. Eichenfield, et al.

CLEO: Science and Innovations
2025

A High-Resolution and High-Bandwidth Nano-Optomechanical Accelerometer with Ultra-low Bias Instability

C. Ge, D. Dominguez, A. Rubenok, M. Miller, M. Eichenfield

CLEO
2025

Voltage Controlled Acousto-Electric Self-Oscillating Lithium Niobate SAW Resonator for Integrated Acousto-Optics

A. Wendt, M. J. Storey, B. Smith, M. Miller, D. Anderson, N. T. Otterstrom, L. Hackett, M. Eichenfield

CLEO
2025

Miniature Magnetometers for Magnetic Navigation using NV Diamond on Piezoelectric Photonic Circuits

N. Leclerc, J. R. Bumstead, K. Hess, J. A. Hagmann, G. Clark, M. Eichenfield, M. Dong

CLEO
2025

Integrated photonic coupling using buckling bistability

R. Shugayev, D. Dominguez, M. Koppa, A. Leenheer, M. Eichenfield

CLEO: Applications and Technology
2025

Piezo-Optomechanically Tunable Ultra-Low-Loss Silicon Nitride Waveguide Photonic Circuits

M. Mishra, G. Choi, G. M. Talcott, M. Gehl, A. Leenheer, D. Dominguez, N. T. Otterstrom, M. Eichenfield

CLEO: Science and Innovations
2025

Nonvolatile Optical Memories implemented with Electrically Programmed Capacitive-Piezoelectric Cantilevers

J. M. Boyle, M. Zimmermann, A. J. Leenheer, D. Dominguez, G. Gilbert, D. Englund, M. Eichenfield, M. Dong

CLEO: Science and Innovations
2025

Coherent Control of an Acoustoelectric Resonator via Simultaneous Optomechanical and Electromechanical Driving

J. Mack, M. J. Storey, N. T. Otterstrom, R. O. Behunin, A. Starbuck, A. Leenheer, K. Musick, D. Trotter, P. T. Rakich, M. Eichenfield, et al.

CLEO: Science and Innovations
2025

Piezo-Optomechanically Tunable Alumina Resonators at Ultraviolet Wavelengths in a CMOS-Fabricated Architecture

Z. A. Castillo, R. Shugayev, A. Leenheer, B. Little, Y. Jau, M. Eichenfield

CLEO
2025

Full-color chip-to-free-space beam scanning from a nanophotonic waveguide

M. Zimmermann, Y. H. Wen, M. Saha, K. J. Palm, A. S. Greenspon, M. Dong, G. Clark, A. J. Leenheer, G. Gilbert, M. Eichenfield, et al.

CLEO: Science and Innovations
2025

Acousto-Optic Frequency-Control of Visible Light in a CMOS-Fabricated Photonic Circuit

J. Freedman, M. Storey, D. Dominguez, A. Leenheer, S. Magri, N. T. Otterstrom, M. Eichenfield

CLEO
2025

Experimentally demonstrated hybrid quantum photonic cavities

A. S. Greenspon, M. Dong, A. Khaykin, T. Espedal, I. Christen, G. Gilbert, M. Eichenfield, D. Englund

CLEO: Science and Innovations
2025

Nonlinear Quantum Frequency Conversion for Quantum Networks Based on Bragg Scattering Four-Wave Mixing

G. Choi, M. Mishra, N. Otterstrom, M. Eichenfield

CLEO
2025

Acoustic Amplification by Stimulated Emission of Radiation Using a Piezoelectric-2DEG Heterostructure Pumped by a Drift Field

E. Chatterjee, D. B. Soh, M. Eichenfield

APS Global Physics Summit
2025

Scalable local addressing of atomic qubits using integrated photonics

N. Wan, M. Zhao, A. Singh, R. J. DeAngelo, H. Thoreen, M. Singh, D. Dominguez, A. Leenheer, R. Szmuk, Y. Romach, et al.

APS Global Physics Summit
2025

Using CMOS-compatible optical modulators to solve I/O challenges in trapped-ion quantum computing

D. Stick, D. Dominguez, M. Eichenfield, M. Gehl, C. Hogle, A. Leenheer, H. McGuinness

IEEE IEDM
2024

Giant electron-mediated phononic nonlinearity in semiconductor–piezoelectric heterostructures

L. Hackett, M. Koppa, B. Smith, M. Miller, S. Santillan, S. Weatherred, S. Arterburn, T. A. Friedmann, N. T. Otterstrom, M. Eichenfield

Nat. Mater. 23, 1386
2024

Strain-concentration for fast, compact photonic modulation and non-volatile memory

Y. H. Wen, D. Heim, M. Zimmermann, R. A. Shugayev, M. Dong, A. J. Leenheer, M. R. Miller, G. Gilbert, M. Heuck, M. Eichenfield, et al.

Optica 11, 1511
2024

Ab initio calculations of nonlinear susceptibility and multiphonon mixing processes in a 2DEG–piezoelectric heterostructure

E. Chatterjee, A. Wendt, D. Soh, M. Eichenfield

Phys. Rev. Research 6
2024

Electrically interfaced Brillouin-active waveguide for microwave photonic measurements

Y. Zhou, F. Ruesink, M. Pavlovich, R. Behunin, H. Cheng, S. Gertler, A. L. Starbuck, A. J. Leenheer, A. T. Pomerene, D. C. Trotter, et al., M. Eichenfield, P. T. Rakich

Nat. Commun. 15, 6796
2024

Nonreciprocal dissipation engineering via strong coupling with a continuum of modes

Y. Zhou, F. Ruesink, S. Gertler, H. Cheng, M. Pavlovich, E. Kittlaus, A. L. Starbuck, A. J. Leenheer, et al., M. Eichenfield, N. T. Otterstrom, A. L. Lentine, P. T. Rakich

Phys. Rev. X 14, 021002
2024

S-band acoustoelectric amplifier in an InGaAs–AlScN–SiC architecture

L. Hackett, X. Du, M. Miller, B. Smith, S. Santillan, J. Montoya, R. Reyna, S. Arterburn, S. Weatherred, T. A. Friedmann, R. H. Olsson III, M. Eichenfield

Appl. Phys. Lett. 124, 113503
2024

Nanoelectromechanical control of spin–photon interfaces in a hybrid quantum system on chip

G. Clark, M. Koppa, K. C. Chen, A. J. Leenheer, L. Li, D. Dominguez, M. Dong, M. Saha, D. A. Golter, G. Gilbert, M. Eichenfield, D. Englund

Nano Lett. 24
2024

Integrating superconducting qubits with phononic devices

S. Skinner Ramos, Y. Deng, B. Smith, M. Miller, C. Harris, M. Eichenfield, L. Hackett, R. Lewis

APS March Meeting
2024

Ab-Initio Calculations of Nonlinear Susceptibility and Multi-Phonon Mixing Processes in a 2D Electron Gas Coupled to a Piezoelectric Material

E. Chatterjee, D. Soh, M. Eichenfield

APS March Meeting
2024

Integrated photonics for trapped ion quantum information

C. Hogle, H. McGuinness, J. Sterk, M. Gehl, W. Setzer, N. Karl, J. Kwon, T. Morrison, D. Dominguez, M. Eichenfield, et al.

APS DAMOP
2024

A scalable local addressing system for optically addressable qubits using integrated photonics

N. Wan, M. Zhao, H. Thoreen, R. Deangelo, A. Singh, N. Gemelke, D. Dominguez, A. Leenheer, M. Eichenfield, D. Englund, et al.

APS DAMOP
2024

An optically broadband piezo-optomechanical magnetometer

Z. Castillo, B. Smith, A. Will-Cole, M. Dong, K. Bussmann, P. Finkel, M. Eichenfield

CLEO: Science and Innovations
2024

Alumina Based Piezo-Optomechanical Blue and Ultraviolet Photonic Integrated Circuits in a VLSI Architecture

R. Shugayev, D. Dominguez, A. Leenheer, B. Little, M. Chow, Y. Jau, M. Eichenfield

CLEO: Science and Innovations
2024

Acoustoelectric RF Mechanical Oscillator with Optomechanical Readout

J. Mack, M. J. Storey, N. T. Otterstrom, R. O. Behunin, A. Starbuck, A. Leenheer, K. Musick, D. Trotter, P. T. Rakich, M. Eichenfield, et al.

Laser Science
2024

Photonic control of atom-like qubits using 2D scanning waveguide-on-cantilever “ski-jumps”

Y. H. Wen, M. Zimmermann, M. Saha, K. J. Palm, A. S. Greenspon, M. Dong, G. Clark, A. Witte, A. J. Leenheer, G. Gilbert, et al.

Quantum 2.0
2024

GHz-Frequency Acousto-Optic Modulation of Visible Light in a CMOS-Fabricated Photonic Circuit

J. Freedman, M. Storey, D. Dominguez, A. Leenheer, N. T. Otterstrom, M. Eichenfield

Laser Science
2024

Resonant mode analysis and 2D projection via waveguide-on-cantilever ski jumps

M. Zimmermann, M. Saha, Y. H. Wen, A. S. Greenspon, M. Dong, A. J. Leenheer, G. Gilbert, M. Eichenfield, D. Englund, et al.

Frontiers in Optics
2024

Stress-programmable out-of-plane interposers for 3-D photonic integration & control

Y. H. Wen, A. S. Greenspon, A. Witte, A. J. Leenheer, G. Gilbert, M. Eichenfield, D. R. Englund

Frontiers in Optics
2024

An Optically Broadband Piezo-Optomechanical Magnetometer with Wide Temperature Range: Towards Fieldable Devices

Z. Castillo, B. Smith, A. Will-Cole, M. Dong, K. Bussmann, P. Finkel, M. Eichenfield

Frontiers in Optics
2024

A High-Resolution and High-Bandwidth Nano-Optomechanical MEMS Accelerometer with Ultra-Wide Optical and Temperature Ranges

C. Ge, D. Dominguez, M. Miller, M. Eichenfield

Frontiers in Optics
2024

Resonantly Driven Programmable Multimode Interference in Photonic Integrated Circuits

H. Larocque, M. Dong, A. Leenheer, N. Otterstrom, G. Gilbert, M. Eichenfield, D. Englund

Frontiers in Optics
2024

Photonic Ribbon Cables: CMOS-fabricated Devices for Scalable Chip-to-chip Optical and Electrical Interconnection

M. Saha, A. Leenheer, G. Clark, J. Damenti, J. Montoya, G. Gilbert, M. Eichenfield, D. Englund

Frontiers in Optics
2024

Piezo-Optomechanically Tunable Ultra-Low-Loss Linear Programmable Processors for Quantum Computing and Networking at Visible Wavelengths

M. Mishra, G. Choi, G. M. Talcott, M. Gehl, A. Leenheer, D. Dominguez, N. T. Otterstrom, M. Eichenfield

Frontiers in Optics
2024

Optical, Microwave, and Acoustic Control of Spin Qubit Arrays in a Scalable Integrated Nanophotonics Platform

D. A. Golter, G. Clark, K. J. Palm, A. S. Greenspon, W. Yzaguirre, K. Chen, L. Li, A. J. Leenheer, M. Eichenfield, G. Gilbert, et al.

Frontiers in Optics
2024

On-chip coupling scheme for synchronization of distant quantum emitters using superradiant coupling channels

R. Shugayev, M. Eichenfield

Frontiers in Optics
2024

Scalable and piezoelectrically tunable hybrid quantum photonic crystal cavities

A. S. Greenspon, M. Dong, A. Khaykin, I. Christen, G. Gilbert, M. Eichenfield, D. Englund

Frontiers in Optics
2024

Design and Fabrication of a MEMS-Enabled Quantum Socket for the Control of All Photonic and Spin Degrees of Freedom of an Artificial Atom in a High-Cooperativity Diamond Microdisk

A. Zhai, G. Clark, M. Dong, J. Mack, Y. H. Wen, M. Saha, A. Greenspon, K. Palm, D. Dominguez, A. Leenheer, et al.

Frontiers in Optics
2024

Design rules for high refresh rate using piezo-MEMS multi-waveguide beam scanners

M. Zimmermann, Y. H. Wen, A. S. Greenspon, M. Dong, A. J. Leenheer, G. Gilbert, M. Eichenfield, D. Englund

Frontiers in Optics
2023

Scalable photonic integrated circuits for high-fidelity light control

A. J. Menssen, A. Hermans, I. Christen, T. Propson, C. Li, A. J. Leenheer, M. Zimmermann, M. Dong, H. Larocque, H. Raniwala, et al., M. Eichenfield, D. Englund

Optica 10, 1366
2023

Non-reciprocal acoustoelectric microwave amplifiers with net gain and low noise in continuous operation

L. Hackett, M. Miller, S. Weatherred, S. Arterburn, M. J. Storey, G. Peake, D. Dominguez, P. S. Finnegan, T. A. Friedmann, M. Eichenfield

Nat. Electron. 6, 76
2023

Aluminum scandium nitride films for piezoelectric transduction into silicon at gigahertz frequencies

L. Hackett, M. Miller, R. Beaucejour, C. M. Nordquist, J. C. Taylor, S. Santillan, R. H. Olsson III, M. Eichenfield

Appl. Phys. Lett. 123
2023

Selective and scalable control of spin quantum memories in a photonic circuit

D. A. Golter, G. Clark, T. El Dandachi, S. Krastanov, A. J. Leenheer, N. H. Wan, H. Raniwala, M. Zimmermann, M. Dong, K. C. Chen, et al., M. Eichenfield, D. Englund

Nano Lett. 23, 7851
2023

High-fidelity trapped-ion qubit operations with scalable photonic modulators

C. W. Hogle, D. Dominguez, M. Dong, A. Leenheer, H. J. McGuinness, B. P. Ruzic, M. Eichenfield, D. Stick

npj Quantum Inf. 9, 74
2023

Piezoelectric nanocavity interface for strong coupling between a superconducting circuit, phonon, and spin

H. Raniwala, S. Krastanov, L. Hackett, M. Eichenfield, D. R. Englund, M. E. Trusheim

Phys. Rev. Applied 19, 064051
2023

Synchronous micromechanically resonant programmable photonic circuits

M. Dong, J. M. Boyle, K. J. Palm, M. Zimmermann, A. Witte, A. J. Leenheer, D. Dominguez, G. Gilbert, M. Eichenfield, D. Englund

Nat. Commun. 14
2023

Modular chip-integrated photonic control of artificial atoms in diamond waveguides

K. J. Palm, M. Dong, D. A. Golter, G. Clark, M. Zimmermann, K. C. Chen, L. Li, A. Menssen, A. J. Leenheer, D. Dominguez, G. Gilbert, M. Eichenfield, D. Englund

Optica 10, 634
2023

Modulation of Brillouin optomechanical interactions via acoustoelectric phonon–electron coupling

N. T. Otterstrom, M. J. Storey, R. O. Behunin, L. Hackett, P. T. Rakich, M. Eichenfield

Phys. Rev. Applied 19, 014059
2023

Programmable photonic integrated meshes for modular generation of optical entanglement links

M. Dong, M. Zimmermann, D. Heim, H. Choi, G. Clark, A. J. Leenheer, K. J. Palm, A. Witte, D. Dominguez, G. Gilbert, M. Eichenfield, D. Englund

npj Quantum Inf. 9, 42
2023

CMOS-fabricated ultraviolet light modulators using low-loss alumina piezo-optomechanical photonic circuits

R. Shugayev, D. Dominguez, A. Leenheer, B. Little, M. N. H. Chow, N. Karl, M. Koppa, M. Gehl, Y.-Y. Jau, M. Eichenfield

Opt. Express 31, 7890
2023

Building a Quantum Repeater Using Optomechanical Oscillators as On-Demand Entanglement Sources

E. Chatterjee, D. Soh, M. Eichenfield

APS March Meeting
2023

Superconducting qubits for phononic integration

W. Kindel, S. Skinner-Ramos, M. Miller, L. Hackett, C. Nordquist, B. Smith, C. T. Harris, R. Lewis, M. Eichenfield, et al.

APS March Meeting
2023

Piezo-optomechanical Control of Silicon Photonic Resonator with CMOS Compatibility

G. M. Talcott, A. J. Leenheer, A. Starbuck, K. Musick, A. Pomerene, C. Dallo, D. C. Trotter, S. Madaras, M. Gehl, A. L. Lentine, et al.

CLEO: Science and Innovations
2023

Scalable photonic integrated circuits for quantum information applications

M. Eichenfield

SPIE Quantum Computing & Simulation
2023

Complex angle isofrequency opening and reciprocity breaking in the refractive dual interface system

R. Shugayev, M. Eichenfield

Frontiers in Optics
2023

High-speed off-chip beam steering via photonic integrated waveguides embedded on vertical ski-jump cantilevers

M. Saha, A. S. Greenspon, Y. H. Wen, M. Zimmermann, A. J. Leenheer, M. Dong, G. Clark, G. Gilbert, M. Eichenfield, D. R. Englund, et al.

Frontiers in Optics
2023

Modular free-space architecture for photonic addressing and collection of artificial atoms in diamond

K. J. Palm, M. Dong, D. A. Golter, G. Clark, M. Zimmermann, K. C. Chen, L. Li, A. Menssen, A. J. Leenheer, D. Dominguez, et al.

Frontiers in Optics
2023

Tunable directional couplers in a scalable piezo-MEMS platform

Y. H. Wen, J. Boyle, M. Zimmermann, A. J. Leenheer, R. Shugayev, M. Dong, G. Clark, G. Gilbert, M. Eichenfield, D. R. Englund, et al.

Frontiers in Optics
2023

Coherent Microwave Control of a Diamond Tin-Vacancy Spin in a Scalable Platform

D. A. Golter, A. S. Greenspon, G. Clark, K. Chen, L. Li, M. Zimmermann, A. J. Leenheer, M. Eichenfield, G. Gilbert, D. R. Englund, et al.

Frontiers in Optics
2023

Nonvolatile Opto-Mechanical Memory in a Fast Switch via Buckling-based Multi-Stability

Y. H. Wen, R. Shugayev, D. Heim, A. J. Leenheer, M. Dong, G. Gilbert, M. Eichenfield, M. Heuck, D. R. Englund, et al.

Frontiers in Optics
2023

Resonantly driven piezoelectric MEMS for programmable photonic circuits

M. Dong, J. M. Boyle, K. J. Palm, M. Zimmermann, A. Witte, A. J. Leenheer, D. Dominguez, G. Gilbert, M. Eichenfield, D. Englund, et al.

Frontiers in Optics
2023

Arbitrary Waveforms from a Resonant Modulator via Coherent Pre-Compensation

M. Zimmermann, Y. H. Wen, M. Dong, A. J. Leenheer, G. Gilbert, M. Eichenfield, M. Heuck, D. R. Englund

Frontiers in Optics
2023

Integrated photonics for trapped-ion quantum computing

D. Stick, D. Dominguez, M. Eichenfield, C. Hogle, J. Hunker, R. Law, A. Leenheer, B. McFarland, H. McGuinness, B. Ruzic, et al.

Quantum 2.0
2023

Applications of phonon-electron devices for microwave frequency signal processing

M. Eichenfield

META
2023

Quantum explorations and applications of phonon-electron interactions

M. Eichenfield

META
2022

Reconfigurable quantum phononic circuits via piezo-acoustomechanical interactions

J. C. Taylor, E. Chatterjee, W. F. Kindel, D. Soh, M. Eichenfield

npj Quantum Inf. 8, 19
2022

Piezo-optomechanical cantilever modulators for VLSI visible photonics

M. Dong, D. Heim, A. Witte, G. Clark, A. J. Leenheer, D. Dominguez, M. Zimmermann, Y. H. Wen, G. Gilbert, D. Englund, M. Eichenfield

APL Photonics 7, 051304
2022

High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture

M. Dong, G. Clark, A. J. Leenheer, M. Zimmermann, D. Dominguez, A. J. Menssen, D. Heim, G. Gilbert, D. Englund, M. Eichenfield

Nat. Photonics 16, 59
2022

Optimal quantum transfer from input flying qubit to lossy quantum memory

E. Chatterjee, D. B. S. Soh, M. Eichenfield

J. Phys. A 55, 105302
2022

Optimal Quantum Transfer from Input Flying Qubit to Lossy Memory

E. Chatterjee, D. Soh, M. Eichenfield

APS March Meeting
2022

Understanding losses in superconducting circuits fabricated on thin silicon membranes for hybrid quantum systems integration

W. Kindel, M. Miller, C. Nordquist, S. Skinner, C. Harris, R. Lewis, M. Eichenfield

APS March Meeting
2022

High-Fidelity Qubit Transfer Between Leaky Memory Blocks

E. Chatterjee, D. Soh, M. Eichenfield

APS March Meeting
2022

Artificial Atom on a Chip Based on Coupling Between 2DEG and Piezo Resonator

E. Chatterjee, D. Soh, M. Eichenfield

APS March Meeting
2022

Long-Distance End-to-End Quantum State Transfer in a Transmon Qubit Network Connected Via Optical Photons

E. Chatterjee, D. Soh, R. Lewis, W. Kindel, L. Hackett, J. Taylor, M. Eichenfield

APS March Meeting
2022

Strong Coupling between a Superconducting Circuit, Phonon, and Electron Spin via a Piezomechanical Nanocavity

H. Raniwala, S. Krastanov, L. Hackett, M. Eichenfield, D. Englund, M. Trusheim

APS March Meeting
2022

Bright Squeezed Light from Dissipative Optomechanical Light Squeezer

D. Soh, M. Eichenfield

APS March Meeting
2022

Microfabricated piezo-optomechanical switches for trapped ion quantum computing

C. Hogle, H. McGuinness, D. Dominguez, M. Eichenfield, D. Stick

APS DAMOP
2022

Compact Piezoelectric Photonic Crystal Modulator in a Visible-NIR 200 mm CMOS Architecture

D. Heim, Y. H. Wen, M. Dong, H. Larocque, A. J. Leenheer, G. Gilbert, M. Eichenfield, M. Heuck, D. R. Englund, et al.

CLEO: Science and Innovations
2022

Programmable multimode interference in a vis-nir photonics platform

H. Larocque, M. Dong, A. Leenheer, G. Gilbert, M. Eichenfield, D. Englund

CLEO: QELS
2022

Scalable Optical Control for Atomic Qubits in a Silicon Nitride Platform

A. Menssen, A. Hermans, I. Christen, M. Dong, M. Zimmermann, A. J. Leenheer, T. Propson, H. Larocque, G. Gilbert, M. Eichenfield, et al.

CLEO: Science and Innovations
2022

Piezoelectric High-Speed Spatial Light Modulator Based on Guided-Mode Resonances

A. Hermans, I. R. Christen, C. Panuski, M. Zimmermann, A. J. Leenheer, M. Dong, G. Gilbert, M. Eichenfield, D. Englund, et al.

CLEO: Science and Innovations
2022

Design and protocol of a spin-optomechanical quantum repeater

H. Raniwala, S. Krastanov, M. Eichenfield, D. Englund

CLEO: Applications and Technology
2022

Computational and Theoretical Modeling of Acoustoelectrically Enhanced Brillouin Optomechanical Interactions in Piezoelectric Semiconductors

M. J. Storey, N. T. Otterstrom, R. O. Behunin, L. Hackett, P. T. Rakich, M. Eichenfield

CLEO: QELS
2022

Scalable Control of Spin Quantum Memories in a Photonic Integrated Circuit

D. A. Golter, G. Clark, T. El Dandachi, S. Krastanov, M. Zimmermann, A. Greenspon, N. Wan, H. Raniwala, K. Chen, L. Li, et al.

CLEO: QELS
2022

Piezoelectric control of spin quantum memories in a cryogenic programmable photonic circuit platform

G. Clark, M. Koppa, K. Chen, A. Leenheer, L. Li, D. Dominguez, M. Dong, M. Saha, D. A. Golter, G. Gilbert, et al.

CLEO: QELS
2022

8-Channel Quantum Photonic Network Switch

M. Dong, K. Palm, G. Clark, D. A. Golter, K. C. Chen, L. Li, A. J. Leenheer, D. Dominguez, M. Zimmermann, D. Heim, et al.

CLEO
2022

Integrated photonics for trapped ion quantum information experiments at Sandia National Laboratories

H. J. McGuinness, M. Gehl, C. G. Hogle, W. J. Setzer, N. Karl, N. Jaber, J. Schultz, J. Kwon, M. Ivory, R. R. Kay, et al.

SPIE Quantum Nanophotonics
2022

Wideband nonmagnetic isolators in silicon photonics

Y. Zhou, F. Ruesink, S. Gertler, H. Cheng, M. Pavlovich, A. L. Starbuck, A. J. Leenheer, A. T. Pomerene, D. C. Trotter, C. Dallo, et al.

Frontiers in Optics
2022

Ultra-wideband Nonreciprocal Acousto-optic Modulators in Silicon Photonics

Y. Zhou, H. Cheng, F. Ruesink, S. Gertler, M. Pavlovich, A. L. Starbuck, A. J. Leenheer, A. T. Pomerene, D. C. Trotter, C. Dallo, et al.

Laser Science
2021

A phononic interface between a superconducting quantum processor and quantum networked spin memories

T. Neuman, M. Eichenfield, M. E. Trusheim, L. Hackett, P. Narang, D. Englund

npj Quantum Inf. 7, 121
2021

Towards single-chip radiofrequency signal processing via acoustoelectric electron–phonon interactions

L. Hackett, M. Miller, F. Brimigion, D. Dominguez, G. Peake, A. Tauke-Pedretti, S. Arterburn, T. A. Friedmann, M. Eichenfield

Nat. Commun. 12, 2769
2021

High-fidelity state transfer between leaky quantum memories

D. Soh, E. Chatterjee, M. Eichenfield

Phys. Rev. Research 3, 033027
2021

Megahertz bandwidth bulk micromachined optomechanical accelerometer with fiber optical interconnects

D. Dominguez, L. Hackett, M. Miller, J. Restrepo, K. Casper, M. Eichenfield

IEEE INERTIAL
2021

Acoustoelectric surface acoustic wave switch in an epitaxial ingaas on lithium niobate heterostructure

M. J. Storey, L. Hackett, S. DiGregorio, M. Miller, G. Peake, M. Eichenfield, D. Weinstein

Transducers
2021

8x8 Programmable Many-mode Interferometer Operating with Visible-wavelength Piezo-Cantilever Modulators

M. Dong, A. J. Leenheer, M. Zimmermann, G. Clark, D. Heim, D. Dominguez, G. Gilbert, D. Englund, M. Eichenfield, et al.

Frontiers in Optics
2021

High-Speed, Cryogenically Compatible, and Visible-Wavelength Photonic Circuits in a 200 mm CMOS Architecture

M. Dong, G. Clark, A. J. Leenheer, M. Zimmermann, D. Dominguez, A. J. Menssen, D. Heim, G. Gilbert, D. Englund, M. Eichenfield, et al.

Frontiers in Optics
2021

Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry

M. A. Koppa, M. Dong, D. Heim, A. J. Leenheer, M. Zimmermann, D. Dominguez, G. Gilbert, D. Englund, M. Eichenfield, et al.

Laser Science
2021

Integrating superconducting circuits with phononic bandgap structures for quantum networking and memory

W. Kindel, C. Harris, S. D. Skinner Ramos, S. DiGregorio, M. Miller, J. Taylor, L. Hackett, R. Lewis, M. Eichenfield, et al.

APS March Meeting
2021

Nanoscale Dolan Bridges with Integrated Stress Relief for Self-Aligned Josephson Junctions

S. Skinner, R. Lewis, M. Eichenfield, C. Harris

APS March Meeting
2019

Investigation of a solid-state tuning behavior in lithium niobate

D. W. Branch, D. S. Jensen, C. D. Nordquist, A. Siddiqui, J. K. Douglas, M. Eichenfield, T. A. Friedmann

IEEE Trans. UFFC 67, 365
2019

High-gain leaky surface acoustic wave amplifier in epitaxial InGaAs on lithium niobate heterostructure

L. Hackett, A. Siddiqui, D. Dominguez, J. K. Douglas, A. Tauke-Pedretti, T. Friedmann, G. Peake, S. Arterburn, M. Eichenfield

Appl. Phys. Lett. 114, 253503
2019

CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures

P. R. Stanfield, A. J. Leenheer, C. P. Michael, R. Sims, M. Eichenfield

Opt. Express 27, 28588
2019

Optimization of si-photonics compatible aln waveguides for integrated nonlinear optics applications

A. M. Siddiqui, D. Dominguez, C. P. Michael, R. Sims, P. Stanfield, L. P. Hackett, A. J. Leenheer, M. Eichenfield

CLEO: QELS
2019

Large acoustoelectric effect in wafer bonded indium gallium arsenide/lithium niobate heterostructure augmented by novel gate control

A. M. Siddiqui, L. P. Hackett, D. Dominguez, A. Tauke-Pedretti, T. Friedmann, G. Peake, M. R. Miller, J. K. Douglas, M. Eichenfield, et al.

Transducers
2019

Heterogeneous Integration of Sub-Micron Thickness Epitaxial Ingaas (P) with Lithium Niobate for Active and Nonlinear Surface Acoustic Wave Devices

L. Hackett, A. Siddiqui, D. Dominguez, J. K. Douglas, A. Tauke-Pedretti, T. Friedmann, S. Arterburn, G. Peake, M. R. Miller, E. Skogen, et al.

ECS Meeting
2018

Lamb wave focusing transducer for efficient coupling to wavelength-scale structures in thin piezoelectric films

A. Siddiqui, R. H. Olsson III, M. Eichenfield

J. Microelectromech. Syst. 27, 1054
2018

Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in

A. M. Siddiqui, C. D. Nordquist, A. Grine, S. Lepkowsk, M. D. Henry, M. Eichenfield, B. A. Griffin

IEEE MEMS
2018

Frequency noise of silicon nitride optomechanical oscillators with integrated waveguides

A. Grine, D. Serkland, M. Wood, A. Soudachanh, A. Hollowell, L. Koch, C. Hains, A. Siddiqui, M. Eichenfield, D. Dagel, et al.

IEEE OMN
2017

Characterizations of SiN and AlN microfabricated waveguides for evanescent-field atom-trap applications

J. Lee, M. Eichenfield, E. Douglas, J. Mudrick, G. Biedermann, Y. Jau

APS DAMOP
2017

Optomechanical spring effect readout in resonant micro-optical Sagnac gyroscopes design and scaling analysis

A. J. Grine, A. Siddiqui, G. A. Keeler, M. J. Shaw, M. Eichenfield, T. Friedman, E. A. Douglas, M. Wood, D. Dagel, C. Hains, et al.

IEEE OMN
2017

Electro-optic modulation of high-Q lithium niobate whispering gallery resonator with integrated ground plane (Conference Presentation)

K. Douglas, J. Moore, T. Friedman, M. Eichenfield

SPIE MOEMS
2016

Regular oscillations and random motion of glass microspheres levitated by a single optical beam in air

J. Moore, L. L. Martin, S. Maayani, K. H. Kim, H. Chandrahalim, M. Eichenfield, I. R. Martin, T. Carmon

Opt. Express 24, 2850
2016

Efficient second harmonic generation in lithium niobate on insulator

J. Moore, J. K. Douglas, I. W. Frank, T. A. Friedmann, R. M. Camacho, M. Eichenfield

CLEO
2016

Entangled photon generation in lithium niobate microdisk resonators through spontaneous parametric down conversion

I. W. Frank, J. Moore, J. Douglas, R. Camacho, M. Eichenfield

CLEO
2016

Direct RF to optical link based on film bulk acoustic wave resonators (FBAR)

A. M. Siddiqui, J. Moore, M. Tomes, P. Stanfield, R. Camacho, M. Eichenfield

CLEO: Science and Innovations
2016

Development of neutral atom traps based on a microfabricated waveguide

Y. Jau, J. Lee, G. Biedermann, A. Siddiqui, M. Eichenfield, E. Dougla

APS DAMOP
2015

Wafer-level packaging of aluminum nitride RF MEMS filters

M. D. Henry, T. Young, A. E. Hollowell, M. Eichenfield, R. H. Olsson

IEEE ECTC
2014

A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication

R. H. Olsson III, K. Hattar, S. J. Homeijer, M. Wiwi, M. Eichenfield, D. W. Branch, M. S. Baker, J. Nguyen, B. Clark, T. Bauer, T. A. Friedmann

Sens. Actuators A 209, 183
2013

Characterization of a 3-D Photonic Crystal Structure Using Port and S-Parameter Analysis

M. Dong, M. Tomes, M. Eichenfield, M. Jarrahi, T. Carmon

SPIE Quantum Computing & Simulation
2013

Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films

M. Eichenfield, R. Olsson

IEEE Ultrasonics Symposium
2013

Clustering of aerosols in a single potential-well trap

J. Moore, L. L. Martin, K. H. Kim, H. Chandrahalim, M. Eichenfield, I. R. Martin, T. Carmon

Frontiers in Optics
2011

Electromagnetically induced transparency and slow light with optomechanics

A. H. Safavi-Naeini, T. P. Mayer Alegre, J. Chan, M. Eichenfield, M. Winger, Q. Lin, J. T. Hill, D. E. Chang, O. Painter

Nature 472, 69
2010

Coherent mixing of mechanical excitations in nano-optomechanical structures

Q. Lin, J. Rosenberg, D. E. Chang, R. Camacho, M. Eichenfield, K. J. Vahala, O. Painter

Nat. Photonics 4, 236
2010

Optical probing and actuation of microwave frequency phononic crystal resonators without clamping losses

M. Eichenfield, J. Chan, A. H. Safavi-Naeini, O. J. Painter

QELS
2010

Nano-Opto-Mechanics: Using Light Forces in Guided-Wave

M. EICHENFIELD, R. M. CAMACHO, J. CHAN, Q. LIN

NAE Frontiers of Engineering
2009

Optomechanical crystals

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, O. Painter

Nature 462, 78
2009

Modeling dispersive coupling and losses of localized optical and mechanical modes in optomechanical crystals

M. Eichenfield, J. Chan, A. H. Safavi-Naeini, K. J. Vahala, O. Painter

Opt. Express 17, 20078
2009

Characterization of radiation pressure and thermal effects in a nanoscale optomechanical cavity

R. M. Camacho, J. Chan, M. Eichenfield, O. Painter

Opt. Express 17, 15726
2009

Optical and mechanical design of a “zipper” photonic crystal optomechanical cavity

J. Chan, M. Eichenfield, R. Camacho, O. Painter

Opt. Express 17, 3802
2009

A picogram- and nanometre-scale photonic-crystal optomechanical cavity

M. Eichenfield, R. M. Camacho, J. Chan, K. J. Vahala, O. Painter

Nature 459, 550
2009

Optomechanics of phononic-photonic crystal defect cavities

M. Eichenfield, J. Chan, R. M. Camacho, O. J. Painter

CLEO
2009

Large optical springs in picogram-scale optomechanical oscillators

M. Eichenfield, R. M. Camacho, J. Chan, O. Painter

CLEO
2009

Stacked integrated double-disks for cavity optomechanics

Q. Lin, X. Jiang, M. Eichenfield, R. Camacho, K. Vahala, O. Painter

CLEO/Europe
2009

Optomechanically tunable photonic crystals for cavity QED

R. Camacho, M. Eichenfield, J. Chan, O. Painter

CLEO
2009

Opto-mechanical oscillations in a double-disk microcavity

Q. Lin, X. Jiang, M. Eichenfield, R. Camacho, P. Herring, K. Vahala, O. Painter

OSA Conference Papers
2008

Optomechanics of strongly-coupled stacked monolithic microdisks

M. Eichenfield, O. Painter

CLEO
2007

Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces

M. Eichenfield, C. P. Michael, R. Perahia, O. Painter

Nat. Photonics 1, 416
2007

Measurement of optical forces within a high-Q microcavity-waveguide system

M. Eichenfield, O. Painter

CLEO
2006

Titania-doped tantala/silica coatings for gravitational-wave detection

G. M. Harry, M. R. Abernathy, A. E. Becerra-Toledo, H. Armandula, E. Black, K. Dooley, M. Eichenfield, C. Nwabugwu, A. Villar, D. R. M. Crooks, G. Cagnoli, et al.

Class. Quantum Grav. 24, 405

// complete record, including conference proceedings → Google Scholar